XRF Spectrometers

A culture of innovation and quality, both for products and services, has made PANalytical what we are today. We have offered X-ray fluorescence spectrometers (XRF) for materials characterization for more than 50 years. 


WDXRF Spectrometers

The Axios XRF spectrometer is the latest addition to the legendary range of PANalytical WDXRF spectrometers: the PW1400 series of the 1970s and 80s and more recently the MagiX and MagiX PRO series with the largest installed base of any WDXRF instrument. 


The Axios FAST is the fastest and most sensitive spectrometer available today. With the CubiX XRF systems we are offering a reliable and renowned spectrometer for the cement and other high tonnage industries. The Venus 200 is a compact, full range, easy-to-use WDXRF spectrometer that provides cost-effective elemental analyses.


Within all industries there currently is a trend for better environmental control and use of natural resources, higher product quality and, at the same time, improved performance of plant operation. XRF instruments are valuable tools here, from measuring traces for environmental reasons to the analysis of wear metals in lubrication oils to ensure proper machine maintenance.


For more than a decade, PANalytical supports the Semiconductor and Data Storage industry with thin film metrology systems. Dedicated to non-contact film thickness and composition analysis, the 2830 ZT XRF Wafer Analyzer has set the standard for 300 mm thin film metrology.



EDXRF Spectrometers

Flexibility will also become more and more important. Our MiniPal 4, MiniPal QC and MiniPal 2 EDXRF spectrometers, for instance, act as valuable stand-alone systems in a broad variety of applications, whilst also serving as effective back-ups for our bigger systems, thereby reducing downtime.


The Epsilon 5 EDXRF spectrometer is designed especially for the continuously increasing environmental market that offers outstanding performances in the low-level determination of heavy elements. It is designed to support applications in geology, agriculture, land reclamation, fossil and secondary fuel usage, emissions monitoring, recycling, catalyst production, and electronics and electrical appliance manufacture.


With the Semyos we extend the thin film product line for XRF in-line measurements on product wafers. With an X-ray spot of less than 23 µm, this uncompromised EDXRF system is dedicated for high-speed measurements on test pads in scribelines.


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