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Taking measurements from semiconductors and thin films
The development of the semiconductor transistor from 1948 onwards has, without doubt, transformed the world.
In fact, the 21st century lives we lead would not be possible without modern semiconductor-based equipment for computers, automotives, navigation and communication.
Driving force for progress
All of these devices originated in the research laboratory, where the understanding of the materials properties of semiconductor devices is the driving force for progress in technological developments. X-ray analysis techniques are ideal tools for detailed studies of semiconductors as they deliver precise information with regard to composition, layer thickness, strain and relaxation - not just for single layers, but also for the most complicated thin film layer structures.
Integrating the new materials
While R&D develops new materials, pilot lines (more recently joined by specialized 'Mother' fabs) integrate them. X-ray analysis is virtually ideal for pilot production – a general purpose 'workhorse' technique that gathers in-depth information.
Volume production
Volume production of semiconductor devices needs high-throughput, high-yield, low-Cost-of-Ownership production lines. For metrology to keep up with line speeds, instruments first need completely automatic operation, with accompanying 24/7 reliability and service.
PANalytical's X-ray solutions for metrology
With dedicated tools, PANalytical supports the semiconductor industry from the R&D lab to pilot production and volume production.
PANalytical's product spectrum of X-ray metrology tools ranges from the X'Pert PRO MRD in research and development labs, to the 2830 ZT Wafer Analyzer in pilot and volume production as well as in research and development labs.
This approach makes PANalytical unique among instrument manufacturers, who have always specialized in instruments for either research and development, or production. The PANalytical approach simplifies the hand-over from R&D to pilot (and even volume production lines) in the silicon, data storage and compound industries.
