Communications for use in automated 300 mm wafer production environments
GEM300 is the catch-all name for the SEMI standards that address 300 mm automation. The software and hardware requirements for automated process control of processing and metrology tools, including the interfaces with automatic, personal and rail-guided vehicles (AGVs, PGVs and RGVs) plus overhead hoisted transports (OHTs) are provided.
GEM300 provides a consistent interface towards the factory host, while the SEMI E95 compliant user interface makes the GEM300 functionality available to the user. PANalytical's GEM300 implementation and operational details are continuously verified against the industry standard test package.
These capabilities join the standard SEMI SECS/GEM communication standards E4, E5, E30 and E37.1
GEM300 – incorporating six separate standards
- E40 (processing management) specifies process jobs and enables different multiple processes to be defined for the substrates within one carrier.
- E94 (control job management) specifies control jobs and defines the methods for defining the order of the process jobs. Control jobs are defined for a complete carrier and can be started automatically when the carrier arrives.
- E90 (substrate tracking) defines the methods for tracking both substrates and the locations that can hold them.
- E84 (enhanced carrier handoff parallel I/O interface) defines communication from the physical automated material handling system (AMHS) transportation, to the physical production or metrology equipment. The E84 implementation is a handshake protocol that ensures safe transfer of carriers between AMHS vehicles (AGV, OHT, PGV, RGV) and equipment.
- E87 (carrier management) defines the behavior and communication requirements for notifying equipment of the future delivery of carriers, reserving load ports, reading and verifying carrier IDs and slot maps, plus moving carriers to the delivery position.
- E39 (object services standards) specifies an object-based interface for all the standards, creating the ability to monitor equipment for fault detection as well as methods for changing recipe variables.