GEM300, GEM200, PANalytical

Automated wafer production environments

The SEMI Equipment Communications Standard (SECS) to Generic Equipment Model (GEM) interface is the semiconductor industry's standard for equipment-to-host communications. GEM200 is the PANalytical software module that enables users of PANalytical XRF metrology systems to easily and reliably interface with the wafer production host in compliance with the SECS/GEM standard. In an automated wafer production environment the interface can start and stop equipment processing, collect measurement data, change variables and select recipes for products.

Developed by the Semiconductor Equipment and Materials International (SEMI) organization, the standards define a common set of equipment behavior and communications capabilities.

Supported standards

PANalytical supports all SECS and GEM standards defined by SEMI, including both SECS I (E4) and SECS II (E5), High speed SECS Message Services (HSMS), E37 and is fully GEM (E30) compliant. This enables the equipment to communicate with a GEM capable host using either RS-232 or TCP/IP based protocol.

Single-wire communication

PANalytical's implementation provides single-wire communication. SECS/GEM defines state models to unambiguously describe equipment behavior. It provides extensive facilities for controlling equipment and handling data, events, and alarms.

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