Determination of composition and thickness
Current X-ray fluorescence spectrometers from PANalytical run on SuperQ software platforms which benefit from an FP Multi software module. This module features an algorithm which enables simultaneous determination of chemical composition and thickness of thin films and multi-layered materials from measurements taken. The software provides a rapid, simple and non-destructive means of analyzing coatings, surface layers and multi-layered structures.
Maximized multi-layer capability:
- Measurement of thickness and composition of stacks
- Best-in-class Fundamental Parameter analysis allowing for maximum accuracy and precision
Minimized calibration costs:
- Superior algorithms allow for a minimum of calibration standards
- Use of generic standards to calibrate complex stacks
- Choice of the method suitable for the analysis: FP, empirical or a combination of both
- Process and report of measurement data using external inputs and/or calculation functions
Ease of use:
- Intuitive recipe setup
- Push-button analysis with automatic reporting
Reducing the need for layered reference materials
An outstanding advantage of the package is that excellent results are achieved with instruments calibrated using conventional bulk XRF standard or reference samples, whose composition and layer structure differ from those of the unknowns. This solves the common problem of obtaining expensive, certified thin films standards that, if available, match production samples as encountered in the analysis of semiconductor wafers and plated metals.
Advanced algorithms model fluorescence for complicated stacks
FP Multi uses fundamental parameters to calculate theoretical X-ray intensities for each constituent. They are then correlated with measured intensities from reference standards, in order to obtain the essential instrumental factors that form the basis of the calculations. To characterize unknown samples, estimated compositions are entered for the one or more layers present. A repeated process of refinement is employed until a close match is achieved with the measured values.