Boosting the SuperQ Thin Film capabilities
- Use FP Multi for simultaneous determination of chemical composition and thickness of thin films and multi-layered materials from measurements taken.
- Use GEM200 to easily and reliably interface with the wafer production host in compliance with the SECS/GEM standard.
- Use GEM300 for communications in automated 300 mm wafer production environments.
- Use SPC for statistical trending in manufacturing environments.