SuperQ Thin Film
For XRF analysis of thin films
SuperQ Thin Film is the software platform that is used with PANalytical’s range of XRF-based metrology systems. The SuperQ Thin Film software platform makes accurate process control and wafer analysis easier than ever. Bringing rapid and automatic verification of layer and stack information across the complete wafer, the software calculates thickness, composition, stoichiometry, dopant levels and uniformity for a wide range of layer types and stacks.