X'Pert³ MRD (XL)

Solar cells can be analyzed by X'Pert³ MRD (XL)

X'Pert³ MRD

Future-proof system flexibility

The X'Pert³ MRD systems offer advanced and innovative X-ray diffraction solutions from research to process development and process control. The used technologies make all systems field upgradable to all existing options and new developments in hardware and software to come.


Key specifications and options

Goniometer Open Eulerian Cradle C-to-C wafer loaders
Minimum step size 0.0001˚ Chi rotation: +/- 92˚ 2” to 150 mm
Radius: X’Pert³ MRD 320 mm (horizontal) Phi rotation: 2 x 360˚ 100 to 300 mm
Radius: X’Pert³ MRD XL 420 mm (horizontal) x,y translation: 100 x 100 mm (X’Pert³ MRD)
x,y translation: 200 x 200 mm (X’Pert³ MRD XL)
z translation: minimum step size 1 µm
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