X’Pert PRO MRD
X'Pert PRO MRD and MRD (XL)
Versatile platform for materials research diffraction
PANalytical's X'Pert PRO Materials Research Diffractometers (MRD) are proven platforms for X-ray scattering studies for:
• advanced materials science
• scientific and industrial thin film technology
• metrological characterization in semiconductor process development
Both systems handle the same wide range of applications with full wafer mapping up to 100 mm (X’Pert PRO MRD) or 200 mm (X’Pert PRO MRD XL).