Data storage industries
Development and manufacturing of data storage devices require unprecedented control of extremely thin layers (< 1 nm). XRF and XRR can both meet the challenging requirements for accurate thin film metrology. These proven techniques provide rapid, non-destructive, reliable and accurate access to critical thin film parameters.
PANalytical: a reliable partner for data storage industries
PANalytical provides non-destructive metrology tools for the rapid evaluation of essential properties in modern multi-stack data storage components. Solutions are available for either research and development (R&D) or in-line process control.
The 2830 ZT determines composition, thickness and surface uniformity of semiconductor films and stacks, by measuring elements from B to U. In addition to best-in-class precision, the 2830 ZT offers unprecedented uptime as a result of the elimination of tube intensity drift through ZETA technology. This feature means that calibration maintenance and drift correction are minimized.
State-of-the-art X-ray reflectometry solutions are based on X’Pert³ MRD (XL); offering the benefits of bright X-ray sources, reliable X-ray optics, ultra-high dynamic detectors and X-ray data modeling using the most recent scientific algorithms. Thickness, density and roughness can be quantified accurately and absolutely.