Thin film metrology

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Thin film metrology

X-ray metrology is the ideal tool for thin film analysis of compound semiconductors in the development and mass production of epitaxial, layer-structured micro- and optoelectronic devices. Measurement tools based on X-ray methods, such as XRD, XRR and XRF, have proven to be powerful for ex-situ investigation of critical materials parameters of epitaxial layers, heterostructures and superlattice systems.

What is XRD?
Materials research

X-ray diffraction is the only laboratory technique that reveals structural information.
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