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XRF applications in the semiconductor and data storage industry (booklet)

PANalytical, XRF

XRF applications in the semiconductor and data storage industry, Marco van der Haar

This booklet describes the major X-ray fluorescence applications in the semiconductor and data storage industries.

In addition to the analytical setup of the applications, the function of the analyzed films and their place in the total production process are also described. The first chapter deals with the design and manufacturing of integrated circuit, followed by a discussion of various XRF applications. A last chapter introduces hard disk storage and finally a literature overview is given.

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