SuperQ Thin Film/GEM300
GEM300 is the catch-all name for the SEMI standards that address 300 mm automation. The software and hardware requirements for automated process control of processing and metrology tools, including the interfaces with automatic, personal and rail-guided vehicles (AGVs, PGVs and RGVs) plus overhead hoisted transports (OHTs) are provided.
GEM300 provides a consistent interface towards the factory host, while the SEMI E95 compliant user interface makes the GEM300 functionality available to the user. PANalytical's GEM300 implementation and operational details are continuously verified against the industry standard test package.
These capabilities join the standard SEMI SECS/GEM communication standards E4, E5, E30 and E37.1