Product (473)

SuperQ Thin Film/GEM200

The SEMI Equipment Communications Standard (SECS) to Generic Equipment Model (GEM) interface is the semiconductor industry's standard for equipment-to-host communications. GEM200 is the PANalytical software module that enables users of PANalytical XRF metrology systems to easily and reliably interface with the wafer production host in compliance with the SECS/GEM standard. In an automated wafer production environment the interface can start and stop equipment processing, collect measurement data, change variables and select recipes for products. Developed by the Semiconductor Equipment and Materials International (SEMI) organization, the standards define a common set of equipment behavior and communications capabilities.