This study demonstrates that Zetium, together with Stratos, is capable of analyzing the thickness of Al coatings deposited on top of polymer layers. The homogeneity of the Al layer at different locations of the polymer film can be determined, which makes the proposed approach an ideal tool for quality control purposes.
PANalytical’s X‘Pert³ MRD and Empyrean are high-precision, flexible and easy-to-use multipurpose diffractometers. Their dual diffracted beam paths are designed to enable a seamless transition between applications. In combination with a motorized sample stage, both sample alignment and data collection can be realized in a single customizable user batch.
An application of Stratos is the analysis of InxSy buffer layers that are deposited as coating layers on glass components of solar cells.
An application of Stratos is the analysis of metallic nickeltantalum thin films, used as Cu diffusion barriers in advanced interconnect applications. In this industry the determination of thickness of multilayers is critical.
In this application note, the results of the X-ray analysis on the thermal stability of an AlInN/AlN/GaN heterostructure is demonstrated. By using a PIXcel3D detector, reciprocal space maps (RSM) were rapidly measured while annealing the sample at 600˚C. The timeresolved data allowed to monitor the degradation process and its kinetics.
This study demonstrates the powerful capabilities of an Axios FAST, PANalytical’s simultaneous WDXRF spectrometer, combined with the Stratos software module for determining the mass thickness of chrome coatings on steels. This is achieved using two bulk standards instead of costly in-type standards.
This study demonstrates the powerful capabilities of an Axios FAST, PANalytical’s simultaneous WDXRF spectrometer, combined with the Stratos software module for determining the mass thickness of Sn coatings on steel using a bulk standard instead of costly in-type standards.
This study demonstrates the powerful capabilities of an Epsilon 4, one of PANalytical’s benchtop EDXRF spectrometers, combined with the Stratos software module for determining the mass thickness of Sn coatings on steel using bulk standard instead of costly in-type standards.
In this report X-ray fluorescence and FP Multi are used to determine thickness and stoichiometry of TiNx thin films.
An application of the Stratos software solution is the analysis of lead in paint films. The Pb content in paint is limited and needs constant screening.
Process control of aluminium interconnect deposition involves the analysis of AlCu films on a Si substrate, where the film thickness and Cu concentration have to be determined. WDXRF spectrometry is the ideal technique for AlCu.
Si1-xGex brings about new metrology challenges with respect to process control. X-ray fluorescence spectrometry provides a fast and non-destructive solution in this respect, yielding high precision results.