Process control of aluminium interconnect deposition involves the analysis of AlCu films on a Si substrate, where the film thickness and Cu concentration have to be determined. WDXRF spectrometry is the ideal technique for AlCu.
Si1-xGex brings about new metrology challenges with respect to process control. X-ray fluorescence spectrometry provides a fast and non-destructive solution in this respect, yielding high precision results.
WDXRF spectrometry is ideal for measuring the composition and film thickness, due to its high accuracy and reproducibility. Also underlying Pt films can be analyzed.
Due to the excellent selectivity and precision, wavelength dispersive X-ray fluorescence spectrometry is the ideal technique for monitoring TaNx films.
To demonstrate the analytical precision of the 2830 ZT wafer analyzer, a 15-cycle repeated measurement was carried out. The wafer was loaded and unloaded between each cycle.
Measurement of copper layer thickness buried in a GMR stack with wavelength dispersive X-ray fluorescence spectrometry.
This application note shows that the Semyos micro X-ray fluorescence spectrometer is easily capable of analyzing CoNiFe films used in the manufacturing of read/write heads for hard drives.
To demonstrate the repeatability of the 2830 ZT wafer analyzer a 30-cycle measurement was carried out, with the wafer being unloaded and loaded between each cycle.
In this report, the reproducibility and long-term stability is shown of the PANalytical 2830 ZT Wafer Analyzer in determining the boron and phosphorus concentration and film thickness of BPSG films.
This application note shows that the Semyos micro X-ray fluorescence spectrometer is easily capable of analyzing NiFe films used in the manufacturing of read/write heads for hard drives.
This application note shows that the Semyos – an energy dispersive micro-spot X-ray fluorescence spectrometer – is easily capable of analyzing Cu Films used in the semiconductor and data storage industry.
This application note demonstrates the performance of the Axios FAST XRF spectrometer for the analysis of titanium alloys.