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Analysis of barium strontium titanate (BST) films on Pt

High-k dielectric materials such as BST play an important role in the constant shrinking of microelectronic components. WDXRF spectrometry is ideal for measuring the composition and film thickness, due to its high accuracy and reproducibility. Also underlying Pt films can be analyzed, as demostrated in this report.

The PANalytical 2830 ZT determines layer composition, thickness, dopant levels and surface uniformity for a wide range of process films and stacks.

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