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Analysis of Giant Magneto Resistance GMR film stacks using X-ray fluorescence spectrometry

Measurement of copper layer thickness buried in a GMR stack with wavelength dispersive X-ray fluorescence spectrometry, utilized by the PANalytical 2830 ZT Wafer Analyzer.

The PANalytical 2830 ZT determines layer composition, thickness, dopant levels and surface uniformity for a wide range of process films and stacks.

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