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Analysis of Al coatings on thin polymer films using Stratos

This study demonstrates that Zetium, together with Stratos, is capable of analyzing the thickness of Al coatings deposited on top of polymer layers. The homogeneity of the Al layer at different locations of the polymer film can be determined, which makes the proposed approach an ideal tool for quality control purposes.

Stratos is an evolution of PANalytical’s market-leading thin film metrology software used in the semiconductor industry. A distinct feature of Stratos is the ability to analyze thin layers by using only bulk standards in the calibration. By doing so, one reduces the dependence on standards that are layered samples, which are often difficult to obtain or certify. Whenever available, layered standards and certified reference materials can still be added for ultimate accuracy. Stratos also makes use of a step-by-step setup guide called the Virtual Analyst which simplifies and optimizes the setup of an application. It suggests the best possible measurement conditions for a specific sample type which can be a tedious and complicated process if done manually.

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