2830 ZT

2830 ZT, PANalytical

2830 ZT

Superior light-element performance

The 2830 ZT has key features that maximize sensitivity and stability of 2830 ZT for light elements. It has a 4 kW output SST-mAX Tube operating at a high current of 160 mA, dedicated high-performance channels for light elements in the range from boron to magnesium, up to 25 detection channels, dry (oil-free) pumps maintaining a clean, sub-Pascal vacuum within the measurement chamber.

Key specifications and options

Sample handling X-ray tube Detector Installation
Wafers of 100 - 300 mm by direct loading SST-mAX50, tapered nose, end-window tube Scintillation with 300 μm Be window Ambient temperature 18 - 25 °C (64 - 77 °F)
Maximum wafer or sample thickness 2.5 mm Measurement spot size 40 and 10 mm Non-inflammable argon/methane SEMI S2/S8 compliant
FOUP, SMIF, open cassette and manual loading Flow counter Full SECS/GEM compliant
Troughput up to 25 wafers per hour Sealed counter
Scanner 10 º-100 º 2θ
Up to 24 detectors
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